The production system Tetra 600 , with its 600-litrechamber volume and PC control, is used in series production (cleaning, etchingand activation)

Special plasma system Tetra 600-LF-PC version 1

Technical data:

Switch cabinet:
W 600 mm, H 2200 mm, D 800 mm

Chamber:
W 1000 mm, H 1000 mm, D 600 mm

Chamber volume:
approx. 600 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Automation:
11 tiers/product carriers

Control
PC control (Windows) with industrial field bus

The productionsystem Tetra 600 LF-PC, with its 600-litre chamber volume and PC control, ismainly used in series production (cleaning, etching and activation):